HEATING ELEMENT COMPRISING MoSi2 AS PRIMARY COMPONENT

Title:

HEATING ELEMENT COMPRISING MoSi2 AS PRIMARY COMPONENT

Document Type and Number:

WIPO Patent Application WO/2003/043952

Kind Code:

A1

Abstract:

A heating element comprising MoSi₂ as a primary component which contains MoSi₂ in an amount of 80 wt % or more and SiO₂ in the residual amount, characterized in that the amounts of Fe, Cr, and Ni contained in said heating element as imperities are 100 wt ppm or less, respectively. The above heating element combines the good characteristics of a heating element comprising MoSi₂ as a primary component that it has a high packing density and the temperature thereof is easy to elevate and easy to control and that it is less prone to deformation during heating and occurrence of a failure such as a short circuit and another characteristic that it contains a contaminant (an impurity) only in a trace amount, and thus is useful especially for a heat treatment furnace (including an oxidation/diffusion furnace).

Inventors:

TAKAMURA HIROSHI (JP)

Application Number:

PCT/JP2002/008710

Publication Date:

May 30, 2003

Filing Date:

August 29, 2002

Export Citation:

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Assignee:

NIKKO MATERIALS CO LTD (JP)
TAKAMURA HIROSHI (JP)

International Classes:

C04B35/58; C04B35/80; H05B3/14; H05B3/62; (IPC1-7): C04B35/58; H05B3/14

Foreign References:

JPH11322431A	1999-11-24
JPH08143365A	1996-06-04
EP0886458A2	1998-12-23
US6211496B1	2001-04-03

Attorney, Agent or Firm:

Ogoshi, Isamu (Toranomon 9 Mori Bldg. 3F 2-2, Atago 1-chom, Minato-ku Tokyo, JP)

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