Title:
HARD COATING FILM
Document Type and Number:
WIPO Patent Application WO/2016/167032
Kind Code:
A1
Abstract:
Provided is a hard coating film formed on a substrate surface, the film comprising a nitride or carbonitride including Al, Cr, and at least one element X having a larger atomic number than Cr and selected from the group consisting of Group IV elements, Group V elements, and Group VI elements, wherein maximum concentration points of element X are repeatedly present in a direction perpendicular to the substrate surface, at least one minimum concentration point of element X is present between vertically adjacent maximum concentration points of element X, and the composition of the film continuously changes vertically.
Inventors:
NII HIROAKI
YAMAMOTO KENJI
YAMAMOTO KENJI
Application Number:
PCT/JP2016/055531
Publication Date:
October 20, 2016
Filing Date:
February 24, 2016
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/06; B23B27/14
Domestic Patent References:
WO2010150411A1 | 2010-12-29 |
Foreign References:
JP2007105843A | 2007-04-26 | |||
JP3969230B2 | 2007-09-05 | |||
JP2008173750A | 2008-07-31 | |||
JP2009125914A | 2009-06-11 | |||
JP2007007765A | 2007-01-18 | |||
JP2007191765A | 2007-08-02 | |||
JP2006055938A | 2006-03-02 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P. C. (JP)
Patent business corporation glory patent firm (JP)
Patent business corporation glory patent firm (JP)
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