Title:
HARD DISK MEDIA INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/108293
Kind Code:
A1
Abstract:
Disclosed is a hard disk media inspection device and inspection method which reduces the stray light component of spectral reflection intensity, and accurately detects pattern shapes and positively detects pattern flaws on a patterned disk. The hard disk media inspection device illuminates the surface of a hard disk drive with a pattern formed thereupon with light containing a plurality of wavelengths; adjusts the intensity of reflected light detected by each wavelength using the stray light component occurring in a detection unit which detects light reflected from the hard disk media; and uses the adjusted intensity of reflected light to calculate spectral reflectance. Further, the intensity of light reflected from the surface of the hard disk media is detected for each wavelength, with the short-wavelength regions of reflected light cut and uncut, and the adjustment is made based on the difference between the two intensities of reflected light.
Inventors:
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
芹川 滋 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
芹川 滋 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
Application Number:
JP2011/050359
Publication Date:
September 09, 2011
Filing Date:
January 12, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
SERIKAWA Shigeru (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
International Classes:
G01N21/95; G01B11/02; G01B11/24; G01N21/27; G01N21/956; G11B5/84
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
Claims:
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