Title:
HARDMASK COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2019/151692
Kind Code:
A1
Abstract:
Embodiments of the present invention provide a precursor polymer which comprises a benzyl alcohol group as at least one among a terminal capping group and a linker group, and which has a polyamic acid or polyhydroxy amide structure. A polymer structure may be formed which exhibits improved mechanical properties by the cross-linking of the benzyl alcohol group.
Inventors:
CHOI SANG JUN (KR)
CHOI HAN YOUNG (KR)
LEE EUN SANG (KR)
YANG DON SIK (KR)
CHOI HAN YOUNG (KR)
LEE EUN SANG (KR)
YANG DON SIK (KR)
Application Number:
PCT/KR2019/000839
Publication Date:
August 08, 2019
Filing Date:
January 21, 2019
Export Citation:
Assignee:
DONGWOO FINE CHEM CO LTD (KR)
CHOI SANG JUN (KR)
CHOI SANG JUN (KR)
International Classes:
G03F7/11; G03F7/075
Domestic Patent References:
| WO2017188263A1 | 2017-11-02 |
Foreign References:
| KR20170072035A | 2017-06-26 | |||
| KR20080034983A | 2008-04-22 | |||
| KR20160023564A | 2016-03-03 | |||
| KR101812764B1 | 2017-12-27 |
Attorney, Agent or Firm:
LEECHAE INTELLECTUAL PROPERTY (KR)
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