Title:
HEAD FOR HOLDING SUBSTRATE, AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/091500
Kind Code:
A1
Abstract:
Provided is a structure that reduces the risk imposed on a retainer member mounting mechanism when a substrate hits a retainer member. One embodiment provides a head for holding a polygonal substrate. The head includes a substrate support surface having a shape corresponding to the shape of the polygonal substrate, a retainer member arranged on the outside of each side of the substrate support surface, and a retainer guide supporting the retainer member, wherein the retainer member includes an engaging surface extending in a direction perpendicular to the substrate support surface, the engaging surface of the retainer member being engaged with the retainer guide.
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Inventors:
KASHIWAGI MAKOTO (JP)
Application Number:
PCT/JP2021/027160
Publication Date:
May 05, 2022
Filing Date:
July 20, 2021
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
B24B37/32; B24B37/10; C03C19/00; H01L21/304
Foreign References:
| JP2020019115A | 2020-02-06 | |||
| JP2002198339A | 2002-07-12 | |||
| JP2001179605A | 2001-07-03 | |||
| JP2005011999A | 2005-01-13 | |||
| JP2020182844A | 2020-11-12 | |||
| JP2003179015A | 2003-06-27 | |||
| US6019670A | 2000-02-01 | |||
| JP2020019115A | 2020-02-06 | |||
| JP2014176950A | 2014-09-25 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
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