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Title:
HEAT CONDUCTION-TYPE BAROMETRIC SENSOR UTILIZING THERMAL EXCITATION
Document Type and Number:
WIPO Patent Application WO/2010/021380
Kind Code:
A1
Abstract:
Disclosed is a heat conduction-type barometric sensor (utilizing thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has simple structure and circuit configuration and can measure a barometric pressure in the range of a very low barometric pressure to 1 atm or higher using one sensor chip. The heat conduction-type barometric sensor comprises a cantilever-shaped thin film (10) provided with a thin-film temperature sensor, a heating means, and an excitation means.  The excitation means utilizes warpage and bending based on a difference in thermal expansion between two main layers constituting the thin film during intermittent heating by a thin-film heater as the heating means, and the two main layers are a silicon layer and a thermally oxidized film of silicon which are significantly different from each other in the coefficient of thermal expansion.  A circuit in which the sensitivity is enhanced by the integration of a Seebeck current for a predetermined period of time, and a cap which can suppress the influence of an air stream can be also provided.

Inventors:
KIMURA, Mitsuteru (2-56, Shiomidai 3-chome Shichigahama-machi, Miyagi-gu, Miyagi 21, 〒9850821, JP)
Application Number:
JP2009/064658
Publication Date:
February 25, 2010
Filing Date:
August 21, 2009
Export Citation:
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Assignee:
KIMURA, Mitsuteru (2-56, Shiomidai 3-chome Shichigahama-machi, Miyagi-gu, Miyagi 21, 〒9850821, JP)
International Classes:
G01L21/14
Attorney, Agent or Firm:
FUKUMORI, Hisao (2F Fuji Building, 5-11 Kudanminami 4-chome, Chiyoda-ku Tokyo 74, 〒1020074, JP)
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