Title:
HEAT CONDUCTION-TYPE SENSOR HAVING INFLUENCE OF TEMPERATURE AND KIND OF FLUID CORRECTED THEREIN, AND HEAT-TYPE FLOW SENSOR AND HEAT-TYPE BAROMETRIC SENSOR USING THE HEAT CONDUCTION-TYPE SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/111368
Kind Code:
A1
Abstract:
Provided is a heat conduction-type sensor which can perform calibration (correction) such that influence of the temperature of a fluid to be measured and the kind of the fluid to a measurement value is eliminated in measurement of flow speed, flow quantity and barometric pressure. Also provided are a heat-type flow sensor and a heat-type barometric sensor, which are provided with the calibration functions, and which have high sensitivity, small size, simple structure, and low cost. This heat conduction-type sensor is provided with at least two thin films, which are thermally isolated from a substrate by means of a same cavity, one of the thin films, i.e., a thin film (10), is provided with a heater and a temperature sensor, and the other thin film (12) is provided with a temperature sensor, and the films are provided as a thin film thermocouple. The thin film (12) is disposed close to the thin film (10) such that the thin film (12) is heated with heat from the heater of the thin film (10) merely via a fluid to be measured. On the basis of information of temperature differences between the temperature of the thin film (12) and the heater temperature, said differences having been measured with respect to a standard fluid and the unknown fluid to be measured at a predetermined temperature without a flow, absolute temperature information, and the like, quantities relating to the heat conductivity of the standard fluid and that of the unknown fluid to be measured are calculated by means of a correction circuit means and compared with each other, and calibration (correction) is performed such that true physical states, such as flow quantity and barometric pressure, can be displayed.
Inventors:
KIMURA MITSUTERU (JP)
Application Number:
PCT/JP2012/050593
Publication Date:
August 23, 2012
Filing Date:
January 13, 2012
Export Citation:
Assignee:
TOHOKU GAKUIN (JP)
KIMURA MITSUTERU (JP)
KIMURA MITSUTERU (JP)
International Classes:
G01F1/692; G01F15/04; G01L21/14
Foreign References:
| JP2006153769A | 2006-06-15 | |||
| JP2001165731A | 2001-06-22 | |||
| JP2009079965A | 2009-04-16 | |||
| JPH03191852A | 1991-08-21 | |||
| JPH08110317A | 1996-04-30 | |||
| JP2003262596A | 2003-09-19 | |||
| JPS55119381A | 1980-09-13 | |||
| JPS6439824A | 1989-02-10 | |||
| JP2006250736A | 2006-09-21 | |||
| JP2009079965A | 2009-04-16 | |||
| US4478077A | 1984-10-23 | |||
| JP2009128254A | 2009-06-11 | |||
| JP2010230601A | 2010-10-14 | |||
| JP2001165731A | 2001-06-22 | |||
| JP2004514153A | 2004-05-13 |
Other References:
See also references of EP 2677283A4
Attorney, Agent or Firm:
FUKUMORI, Hisao (JP)
Hisao Fukumori (JP)
Hisao Fukumori (JP)
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Claims: