Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HEAT-CURABLE ADHESIVE SHEET AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/104670
Kind Code:
A1
Abstract:
Provided are: a heat-curable adhesive sheet that reduces warping of a semiconductor wafer and reduces the occurrence of chipping; and a production method for a semiconductor device. The heat-curable adhesive sheet has a heat-curable adhesive layer comprising a resin composition containing a filler and a resin component including an epoxy compound and a curing agent. A value for the total obtained when the reciprocal of the epoxy equivalent for the epoxy compound is multiplied by the epoxy compound content ratio in the resin component is at least 1.15E-04. The filler blending amount is at least 50 parts by mass relative to 100 parts by mass resin component. The heat-curable adhesive sheet is pasted to a polished surface of a semiconductor wafer and cured, prior to dicing.

Inventors:
MORI DAICHI (JP)
ISHIMATSU TOMOYUKI (JP)
Application Number:
PCT/JP2016/087090
Publication Date:
June 22, 2017
Filing Date:
December 13, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
DEXERIALS CORP (JP)
International Classes:
C09J7/10; C09J11/04; C09J11/06; C09J11/08; C09J163/00; H01L21/301; H01L21/304
Domestic Patent References:
WO2013161864A12013-10-31
WO2015046529A12015-04-02
Foreign References:
JP2015032644A2015-02-16
JP2014197675A2014-10-16
JP2013181049A2013-09-12
Attorney, Agent or Firm:
NOGUCHI, Nobuhiro (JP)
Download PDF: