Title:
HEAT FLOW SWITCHING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/166950
Kind Code:
A1
Abstract:
Provided is a heat flow switching element in which there is a larger change in thermal conductivity, which has excellent thermal responsiveness, and which enables direct detection of a temperature change. A heat flow switching element according to the present invention is provided with: a heat flow control element part 10 that is provided with an N-type semiconductor layer 3, an insulator layer 4 laminated on the N-type semiconductor layer, and a P-type semiconductor layer 5 laminated on the insulator layer; and thermosensitive element parts 11A, 11B which are joined to the heat flow control element part. The thermosensitive element parts are each provided with: a thin film thermistor part which is formed from a thermistor material, and a pair of counter electrodes formed opposingly above and/or below the thin film thermistor part. The thin film thermistor parts are laminated above and/or below the heat flow control element part.
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Inventors:
FUJITA TOSHIAKI (JP)
ARAI KOYA (JP)
ARAI KOYA (JP)
Application Number:
PCT/JP2021/005893
Publication Date:
August 26, 2021
Filing Date:
February 17, 2021
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
G01K1/14; G01K7/22; G01K17/06; H01L37/00
Domestic Patent References:
| WO2004068604A1 | 2004-08-12 |
Foreign References:
| JP2016037913A | 2016-03-22 | |||
| JP2019138798A | 2019-08-22 | |||
| JP2014133852A | 2014-07-24 | |||
| JP2781892B2 | 1998-07-30 | |||
| JP5402346B2 | 2014-01-29 | |||
| JP2016216688A | 2016-12-22 |
Other References:
MATSUNAGA, TAKUYA ET AL.: "A field effect heat flow switching device", THE 38TH INTERNATIONAL CONFERENCE ON THERMOELECTRICS AND THE 4TH ASIAN CONFERENCE ON THERMOELECTRICS, ABSTRACT BOOK, 30 November 2018 (2018-11-30), JP, pages 73 - 76, XP009530728
TAKUYA MATSUNAGA: "Preparation of Heat Flow Switching Element Operated with Bias Voltage", 15TH MEETING OF THE THERMOELECTRICS SOCIETY OF JAPAN, 13 September 2018 (2018-09-13)
R. D. SHANNON, ACTA CRYSTALLOGR., SECT. A, vol. 32, 1976, pages 751
See also references of EP 4109062A4
TAKUYA MATSUNAGA: "Preparation of Heat Flow Switching Element Operated with Bias Voltage", 15TH MEETING OF THE THERMOELECTRICS SOCIETY OF JAPAN, 13 September 2018 (2018-09-13)
R. D. SHANNON, ACTA CRYSTALLOGR., SECT. A, vol. 32, 1976, pages 751
See also references of EP 4109062A4
Attorney, Agent or Firm:
TAKAOKA Ryoichi (JP)
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