HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA TREATMENT DEVICE

Title:

HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA TREATMENT DEVICE

Document Type and Number:

WIPO Patent Application WO/2023/189064

Kind Code:

A1

Abstract:

This heat transfer member is made of a sintered body of a molded product containing a fluororesin or a fluoroelastomer, and has a hardness lower than that of the molded product by at least 7, as measured using a type AM durometer according to JIS K 6253-3:2012. This heat transfer member has high plasma resistance and can maintain high adhesion to various members for a long period of time.

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Inventors:

SHOJI MIHO (JP)
ZUSHI TOSHIHIRO (JP)
HIRANO KOSEI (JP)
YAMAMOTO TETSUYA (JP)

Application Number:

PCT/JP2023/006657

Publication Date:

October 05, 2023

Filing Date:

February 24, 2023

Export Citation:

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Assignee:

MITSUBISHI MATERIALS CORP (JP)
MITSUBISHI CABLE IND LTD (JP)

International Classes:

H05H1/46; H01L21/3065

Foreign References:

JP2015084383A	2015-04-30
JP2022047104A	2022-03-24
JP2020027914A	2020-02-20
JP2021141314A	2021-09-16

Attorney, Agent or Firm:

MATSUNUMA Yasushi et al. (JP)

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