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Patent Searching and Data


Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/117617
Kind Code:
A1
Abstract:
Provided is a heat treatment apparatus whereby a temperature distribution can be controlled with good reproducibility. A heat treatment apparatus (1) is provided with a cylindrical heater (20), troughs (30), (40) comprising graphite tubes connected to both ends of the heater (20), and electrodes (31), (41) formed in the troughs (30), (40). The heater (20) includes: a first graphite tube (21B); a second graphite tube (21C) arranged so that one end face thereof is in contact with one end face of the first graphite tube (21B), the second graphite tube (21C) having an electrical resistance higher than the electrical resistance of the first graphite tube (21B); and a third graphite tube (21D) arranged so that one end face thereof is in contact with the other end face of the second graphite tube (21C), the third graphite tube (21D) having an electrical resistance lower than the electrical resistance of the second graphite tube (21C).

Inventors:
NAKAMURA, Junichi (Ltd. Kyoto Plant 3-26, Osadano-cho, Fukuchiyama-sh, Kyoto 53, 〒6200853, JP)
ARAKAWA, Eigo (Ltd. Kyoto Plant 3-26, Osadano-cho, Fukuchiyama-sh, Kyoto 53, 〒6200853, JP)
Application Number:
JP2016/051604
Publication Date:
July 28, 2016
Filing Date:
January 20, 2016
Export Citation:
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Assignee:
SEC CARBON, LTD. (6th Floor, Amagasaki Front Bldg. 2-6, Shioe 1-chome, Amagasaki-sh, Hyogo 76, 〒6610976, JP)
International Classes:
F27B9/36; F27D11/02; H05B3/00
Foreign References:
JP2000211909A2000-08-02
JPH08198612A1996-08-06
Other References:
See also references of EP 3249329A4
Attorney, Agent or Firm:
UEBA, Hidetoshi et al. (INTELIX Patent & Law Firm, Dojima Axis Building 2-28, Dojimahama 2-chome, Kita-ku, Osaka-sh, Osaka 04, 〒5300004, JP)
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