Title:
HEATER BLOCK FOR A RAPID THERMAL PROCESSING APPARATUS IN WHICH A COOLING WATER FLOW IS DIVIDED INTO AN UPPER LAYER AND A LOWER LAYER
Document Type and Number:
WIPO Patent Application WO/2011/021797
Kind Code:
A2
Abstract:
The present invention relates to a heater block for a rapid thermal processing apparatus, wherein a plurality of lamp pockets (21) for accommodating heating lamps are arranged, and cooling water inlet ports (111a, 111b) and cooling water outlet ports (112a, 112b) are arranged such that the lamp pockets (21) are cooled by the flow of the cooling water fed via the cooling water inlet ports (111a, 111b) and discharged via the cooling water outlet ports (112a, 112b). In detail, the cooling water inlet ports (111a, 111b) and the cooling water outlet ports (112a, 112b) are separately arranged into an upper layer and a lower layer, such that the flow of the cooling water fed via the cooling water inlet ports (111a, 111b) and discharged via the cooling water outlet ports (112a, 112b) is divided into an upper layer and a lower layer. Preferably, cooling water dispersion means (140) are installed at entries of the cooling water inlet ports (111a, 111b) so as to disperse the cooling water in a lateral direction. According to the present invention, the cooling water flows separately in the upper layer and the lower layer to improve cooling efficiency, and particularly, lower portions of the lamp pockets, in which heat discharged by the heating lamps is concentrated, can be maximally cooled. In addition, the cooling water dispersion means prevents the formation of a dead zone, thereby uniformly cooling the entirety of the heater block.
Inventors:
SHIM, Jang Woo (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
심장우 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
KIM, Sung Chul (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
김성철 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
심장우 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
KIM, Sung Chul (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
김성철 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
Application Number:
KR2010/005120
Publication Date:
February 24, 2011
Filing Date:
August 04, 2010
Export Citation:
Assignee:
AP SYSTEMS INC. (605 Jung-ri, Dongtan-myeon Hwaseong-si, Gyeonggi-do 445-813, 445-813, KR)
에이피시스템 주식회사 (경기도 화성시 동탄면 중리 605, 445-813 Gyeonggi-do, 445-813, KR)
SHIM, Jang Woo (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
심장우 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
KIM, Sung Chul (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
에이피시스템 주식회사 (경기도 화성시 동탄면 중리 605, 445-813 Gyeonggi-do, 445-813, KR)
SHIM, Jang Woo (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
심장우 (경기도 화성시 병점동 대창아파트 103동 802호, 445-360 Gyeonggi-do, 445-360, KR)
KIM, Sung Chul (#103-802, Daechang Apt. Byeongjeom-dong, Hwaseong-si, Gyeonggi-do 445-360, 445-360, KR)
International Classes:
H05B3/40; H01J7/24
Attorney, Agent or Firm:
AJU KIM CHANG & LEE (6th Floor, Hubbahubba Building648, Yeoksam-dong, Gangnam-gu, Seoul 135-911, 135-911, KR)
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