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Patent Searching and Data


Title:
HEATER AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/208626
Kind Code:
A1
Abstract:
A heater having a substrate and a resistance heating element. The substrate comprises an insulating material and has an upper surface having a wafer mounted thereupon. The resistance heating element extends along the upper surface inside the substrate. The upper surface of the resistance heating element and the substrate are in contact and a vacuum or a gas-filled gap is interposed between the side surface of the resistance heating element and the substrate.

Inventors:
KAWANABE, Yasunori (6 Takeda Tobadono-cho, Fushimi-ku, Kyoto-sh, Kyoto 01, 〒6128501, JP)
OKAWA, Yoshihiro (6 Takeda Tobadono-cho, Fushimi-ku, Kyoto-sh, Kyoto 01, 〒6128501, JP)
ISHIMINE, Yuusaku (6 Takeda Tobadono-cho, Fushimi-ku, Kyoto-sh, Kyoto 01, 〒6128501, JP)
TERAO, Shinya (6 Takeda Tobadono-cho, Fushimi-ku, Kyoto-sh, Kyoto 01, 〒6128501, JP)
Application Number:
JP2019/017409
Publication Date:
October 31, 2019
Filing Date:
April 24, 2019
Export Citation:
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Assignee:
KYOCERA CORPORATION (6 Takeda Tobadono-cho, Fushimi-ku Kyoto-sh, Kyoto 01, 〒6128501, JP)
International Classes:
H05B3/14; H05B3/18
Foreign References:
JP2000021890A2000-01-21
JP2004327256A2004-11-18
JP2005340050A2005-12-08
JP2010257956A2010-11-11
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (Sohshin International Patent Office, SS building 2F 4-2, Nishi-Shinbashi 3-chome, Minato-k, Tokyo 03, 〒1050003, JP)
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