Title:
HEATING ARRANGEMENT AND METHOD FOR HEATING SUBSTRATES
Document Type and Number:
WIPO Patent Application WO/2012/013707
Kind Code:
A1
Abstract:
The invention relates to a vacuum processing system for processing a substrate (2), with an enclosure (1) for carrying the substrate (2) to be treated in a substrate plane (4), whereby the enclosure (1) comprises a first reflecting means (6) and a heating means (5) having a first plane surface (10) and an opposed second plane surface (11), the heating means (5) is configured for irradiating heating energy only via the first surface (10) and/or via the second surface (11), the first reflecting means (6) is configured for reflecting the heating energy irradiated by the heating means (5) onto the substrate plane (4), and the heating means (5) is arranged such that the first surface (10) faces towards the first reflecting means (6) and the second surface (11) faces towards the substrate plane (4).
Inventors:
PINK, Edwin (Engadinstraße 12, Chur, CH-7000, CH)
HOTZ, Philipp (Berggasse 10, Chur, CH-7000, CH)
HOTZ, Philipp (Berggasse 10, Chur, CH-7000, CH)
Application Number:
EP2011/062912
Publication Date:
February 02, 2012
Filing Date:
July 27, 2011
Export Citation:
Assignee:
OERLIKON SOLAR AG, TRÜBBACH (Hauptstrasse 1a, Trübbach, CH-9477, CH)
PINK, Edwin (Engadinstraße 12, Chur, CH-7000, CH)
HOTZ, Philipp (Berggasse 10, Chur, CH-7000, CH)
PINK, Edwin (Engadinstraße 12, Chur, CH-7000, CH)
HOTZ, Philipp (Berggasse 10, Chur, CH-7000, CH)
International Classes:
H01L21/67
Attorney, Agent or Firm:
SCHULZ, Dirk (Michalski Hüttermann & Partner Patentanwälte, Neuer Zollhof 2, Düsseldorf, 40221, DE)
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