Title:
HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND INDIRECT HEATING METHOD USING LASER BEAM
Document Type and Number:
WIPO Patent Application WO/2019/151543
Kind Code:
A1
Abstract:
A heating device for heating an object material by using a laser beam comprises: a stage on which the object material is placed; a laser module for generating and outputting a laser beam; an optical module for controlling a path of the laser beam; a polygon mirror rotating around a rotating shaft and having a plurality of reflection surfaces for reflecting the laser beam; and a beam guide module for controlling an incident range in which the laser beam reflected by the polygon mirror enters the object material.
Inventors:
RYU JEONG DO (KR)
Application Number:
PCT/KR2018/001260
Publication Date:
August 08, 2019
Filing Date:
January 30, 2018
Export Citation:
Assignee:
RYU JEONG DO (KR)
International Classes:
H01L21/67; G03F7/20; G03F7/40; H01L27/11556; H01S3/00
Foreign References:
| KR20060047214A | 2006-05-18 | |||
| KR20130138686A | 2013-12-19 | |||
| KR20090029221A | 2009-03-20 | |||
| KR20130081308A | 2013-07-16 | |||
| KR20120094151A | 2012-08-23 |
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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