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Title:
HEATING MEDIUM CIRCULATING DEVICE AND THERMAL TREATMENT EQUIPMENT USING THE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/033973
Kind Code:
A1
Abstract:
A heating medium circulating device for temperature control having a small size and less requiring an installation space, wherein a temperature−controlled body as an object for temperature control, a main heat exchanger (88) for exchanging heat mainly with heating medium, and a circulating pump (84) are installed in a heating medium circulating system (78), and an auxiliary heat exchanger (96) using a thermoelectric cooling element (100) is installed in the heating medium circulating system on the downstream side of the main heat exchanger for controlling the temperature of the heating medium, whereby the size of the device can be reduced and the installation space thereof can also be less required.

Inventors:
YAMAZAKI KOICHI (JP)
Application Number:
PCT/JP2002/010383
Publication Date:
April 24, 2003
Filing Date:
October 04, 2002
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
YAMAZAKI KOICHI (JP)
International Classes:
F25B21/02; C23C16/46; F28D21/00; H01L21/00; H01L21/205; H01L21/22; H01L21/26; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): F25B21/02; F25D9/00; F25D11/00; H01L21/02
Foreign References:
JP2001034344A2001-02-09
JPH10339517A1998-12-22
JPH10151631A1998-06-09
US5956965A1999-09-28
JPH05132987A1993-05-28
JPH0814692A1996-01-19
JPH10132436A1998-05-22
JPH0240930Y21990-10-31
JP2001041495A2001-02-13
JP2000299280A2000-10-24
US5525160A1996-06-11
Attorney, Agent or Firm:
Yoshitake, Kenji (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, JP)
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