Title:
HEATING MEMBER AND HEATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/073563
Kind Code:
A1
Abstract:
This heating member is provided with a heat-generating body, a conductor layer, and window parts. The heat-generating body is formed from a mixture of a dielectric material and conductor particles which is a microwave absorber. The conductor layer covers at least a portion of the surface of the microwave absorber. The window parts are provided to at least a portion of the conductor layer, and guide microwaves with which the microwave absorber is to be irradiated. The ratio of the volume of the conductor particles to the volume of the heat-generating body is at least 0.04, but not more than 0.15.
Inventors:
USHIJIMA MITSURU (JP)
IWABUCHI KATSUHIKO (JP)
MATSUZAKI KAZUYOSHI (JP)
SUZUKI AYUTA (JP)
KASAI SHIGERU (JP)
SAMESHIMA TOSHIYUKI (JP)
IWABUCHI KATSUHIKO (JP)
MATSUZAKI KAZUYOSHI (JP)
SUZUKI AYUTA (JP)
KASAI SHIGERU (JP)
SAMESHIMA TOSHIYUKI (JP)
Application Number:
PCT/JP2016/081587
Publication Date:
May 04, 2017
Filing Date:
October 25, 2016
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
NAT UNIV CORP TOKYO UNIV AGRICULTURE & TECH (JP)
NAT UNIV CORP TOKYO UNIV AGRICULTURE & TECH (JP)
International Classes:
H05B6/64; H01L21/324; H05B6/76
Domestic Patent References:
| WO2013145932A1 | 2013-10-03 |
Foreign References:
| JPS4837293B1 | 1973-11-10 | |||
| JP2006147782A | 2006-06-08 | |||
| JPH05270942A | 1993-10-19 | |||
| JP2009295905A | 2009-12-17 | |||
| JPH0754742B2 | 1995-06-07 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: