Title:
HEIGHT MEASUREMENT DEVICE AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/092641
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a height measurement device capable of highly accurate measurement in the depth direction of a structure on a sample. To achieve this objective, proposed are a charged particle beam device and a height measurement device that is provided with a calculation device for determining the size of a structure on a sample on the basis of a detection signal obtained by irradiating the sample with a charged particle beam, wherein the calculation device calculates the distance from a first charged particle beam irradiation mark formed at a first height on the sample and a second charged particle beam irradiation mark formed at a second height on the sample and on the basis of this distance and the charged particle beam irradiation angle when the first charged particle beam irradiation mark and second charged particle beam irradiation mark were formed, calculates the distance between the first height and the second height.
Inventors:
KAWADA HIROKI (JP)
FUKUDA MUNEYUKI (JP)
MOMONOI YOSHINORI (JP)
TAKAMI SHOU (JP)
FUKUDA MUNEYUKI (JP)
MOMONOI YOSHINORI (JP)
TAKAMI SHOU (JP)
Application Number:
PCT/JP2014/082610
Publication Date:
June 16, 2016
Filing Date:
December 10, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; G01B15/00; H01J37/317
Foreign References:
| JPH07191449A | 1995-07-28 | |||
| JPH01193685A | 1989-08-03 | |||
| JPH09257445A | 1997-10-03 | |||
| JP2014025815A | 2014-02-06 | |||
| JP2013120169A | 2013-06-17 | |||
| JP2012177654A | 2012-09-13 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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