Title:
HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS
Document Type and Number:
WIPO Patent Application WO/2013/036394
Kind Code:
A3
Abstract:
This disclosure provides implementations of high surface area stacked layered metallic structures, devices, apparatus, systems, and related methods. A plurality of stacked layers on a substrate may be manufactured from a plating bath including a first metal and a second metal. A modulated plating current can deposit alternate first metal layers and alloy layers, the alloy layers including the first metal and the second metal. Gaps between the alloy layers can be formed by selectively etching some portions of the first metal layers to define a stacked layered structure. Stacked layered structures may be useful in applications to form capacitors, inductors, catalytic reactors, heat transfer tubes, non-linear springs, filters, batteries, and heavy metal purifiers.
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Inventors:
STEPHANOU PHILIP JASON (US)
LONDERGAN ANA RANGELOVA (US)
GOUSEV EVGENI PETROVICH (US)
SHENOY RAVINDRA VAMAN (US)
LONDERGAN ANA RANGELOVA (US)
GOUSEV EVGENI PETROVICH (US)
SHENOY RAVINDRA VAMAN (US)
Application Number:
PCT/US2012/052524
Publication Date:
May 02, 2013
Filing Date:
August 27, 2012
Export Citation:
Assignee:
QUALCOMM MEMS TECHNOLOGIES INC (US)
STEPHANOU PHILIP JASON (US)
LONDERGAN ANA RANGELOVA (US)
GOUSEV EVGENI PETROVICH (US)
SHENOY RAVINDRA VAMAN (US)
STEPHANOU PHILIP JASON (US)
LONDERGAN ANA RANGELOVA (US)
GOUSEV EVGENI PETROVICH (US)
SHENOY RAVINDRA VAMAN (US)
International Classes:
C23C28/02; B81C1/00; C25D5/10; C25D5/18
Other References:
LIM C-Y ET AL: "DEVELOPMENT OF AN ELECTRODEPOSITED NANOMOLD FROM COMPOSITIONALLY MODULATED ALLOYS", JOURNAL OF APPLIED ELECTROCHEMISTRY, SPRINGER, DORDRECHT, NL, vol. 34, no. 8, 1 August 2004 (2004-08-01), pages 857 - 866, XP001540808, ISSN: 0021-891X, DOI: 10.1023/B:JACH.0000035605.46239.6C
ALLEN M G: "MEMS technology for the fabrication of RF magnetic components", IEEE TRANSACTIONS ON MAGNETICS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 39, no. 5, 1 September 2003 (2003-09-01), pages 3073 - 3078, XP011101206, ISSN: 0018-9464, DOI: 10.1109/TMAG.2003.816006
SAKAI S ET AL: "Oscilation-Induced Layer-by-Layer Electrodeposition Producting Alternate Metal and Metal-Alloy Multilayers on a Nanometer Scale", CHEMISTRY LETTERS, CHEMICAL SOCIETY OF JAPAN, 1 January 2002 (2002-01-01), pages 640 - 641, XP002989895, ISSN: 0366-7022, DOI: 10.1246/CL.2002.640
ALLEN M G: "MEMS technology for the fabrication of RF magnetic components", IEEE TRANSACTIONS ON MAGNETICS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 39, no. 5, 1 September 2003 (2003-09-01), pages 3073 - 3078, XP011101206, ISSN: 0018-9464, DOI: 10.1109/TMAG.2003.816006
SAKAI S ET AL: "Oscilation-Induced Layer-by-Layer Electrodeposition Producting Alternate Metal and Metal-Alloy Multilayers on a Nanometer Scale", CHEMISTRY LETTERS, CHEMICAL SOCIETY OF JAPAN, 1 January 2002 (2002-01-01), pages 640 - 641, XP002989895, ISSN: 0366-7022, DOI: 10.1246/CL.2002.640
Attorney, Agent or Firm:
GRIFFITH, John, F. et al. (P.O. Box 70250Oakland, California, US)
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