Title:
HIGH-BANDWIDTH CAVITY TYPE FILM BULK ACOUSTIC RESONATOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/125757
Kind Code:
A1
Abstract:
The present invention provides a high-bandwidth cavity type film bulk acoustic resonator and a preparation method therefor. The resonator sequentially comprises a substrate, a bonding layer, a bottom electrode, a composite piezoelectric film, and a top electrode from bottom to top. The top electrode, the composite piezoelectric film and the bottom electrode form a sandwich structure. The composite piezoelectric film is formed by superposing a plurality of piezoelectric layers. The substrate, the bonding layer, and the bottom electrode are encircled to form an air cavity. According to the resonator, after the top electrode is electrified, the composite piezoelectric film deforms and excites bulk acoustic waves, and when the bulk acoustic waves are transmitted between the composite piezoelectric film and the bottom electrode, due to the existence of the air cavity, the bulk acoustic waves are totally reflected on the surface of the bottom electrode and are limited between the top electrode and the bottom electrode to form resonance. Moreover, because the electromechanical coupling coefficient of the composite piezoelectric film is relatively high, the bandwidth of the film acoustic resonator is further improved.
Inventors:
LI GUOQIANG (CN)
Application Number:
PCT/CN2022/143187
Publication Date:
July 06, 2023
Filing Date:
December 29, 2022
Export Citation:
Assignee:
HEYUAN AIFO LIGHT COMMUNICATION TECH CO LTD (CN)
International Classes:
H03H9/02
Foreign References:
| CN114362711A | 2022-04-15 | |||
| CN114531126A | 2022-05-24 | |||
| CN111697937A | 2020-09-22 | |||
| CN204392205U | 2015-06-10 | |||
| CN112039460A | 2020-12-04 | |||
| CN105897211A | 2016-08-24 | |||
| US20180175826A1 | 2018-06-21 |
Attorney, Agent or Firm:
JIAQUAN IP LAW (CN)
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