Title:
HIGH-DAMPING RC LATTICE GIRDER AND HIGH-DAMPING RC LATTICE GIRDER STRUCTURE USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/088365
Kind Code:
A1
Abstract:
The present invention relates to a RC lattice girder capable of specifically and greatly damping vibration transmission, and the objective of the present invention is to provide a high-damping RC lattice girder formed from a polymer concrete by adding a polymer to concrete forming the RC lattice girder, so as to effectively dampen a micro vibration affecting exposure equipment while maintaining the depth, as is, of a conventional lattice girder, thereby reducing a defect rate such that the productivity of semiconductors can be improved, and thus the performance of the precise exposure equipment is maximized.
Inventors:
PARK CHAN KYU (KR)
AHN SANG KYUNG (KR)
KIM YONG KU (KR)
NOH HYUN SUP (KR)
LEE EUN SEOK (KR)
LEW YOUNG KEE (KR)
JEON BYONG KAP (KR)
JUNG JAE EUN (KR)
AHN SANG KYUNG (KR)
KIM YONG KU (KR)
NOH HYUN SUP (KR)
LEE EUN SEOK (KR)
LEW YOUNG KEE (KR)
JEON BYONG KAP (KR)
JUNG JAE EUN (KR)
Application Number:
PCT/KR2018/000622
Publication Date:
May 09, 2019
Filing Date:
January 12, 2018
Export Citation:
Assignee:
SAMSUNG C&T CORP (KR)
International Classes:
E04B5/04; E04B5/08
Foreign References:
| JP2003293506A | 2003-10-15 | |||
| KR20150116128A | 2015-10-15 | |||
| KR20160087217A | 2016-07-21 | |||
| KR101742539B1 | 2017-06-01 | |||
| JP2009174249A | 2009-08-06 |
Attorney, Agent or Firm:
LEE, Un Cheol (KR)
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