Title:
HIGH DEFINITION HEATER SYSTEM HAVING A FLUID MEDIUM
Document Type and Number:
WIPO Patent Application WO/2013/033394
Kind Code:
A3
Abstract:
An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two- phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.
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Inventors:
SMITH KEVIN ROBERT (US)
PTASIENSKI KEVIN (US)
DERLER RAY ALAN (US)
SWANSON CAL THOMAS (US)
SCHMIDT PHILIP STEVEN (US)
NOSRATI MOHAMMAD (US)
LINDLEY JACOB ROBERT (US)
BOLDT ALLEN NORMAN (US)
ZHANG SANHONG (US)
STEINHAUSER LOUIS P (US)
GRIMARD DENNIS STANLEY (US)
PTASIENSKI KEVIN (US)
DERLER RAY ALAN (US)
SWANSON CAL THOMAS (US)
SCHMIDT PHILIP STEVEN (US)
NOSRATI MOHAMMAD (US)
LINDLEY JACOB ROBERT (US)
BOLDT ALLEN NORMAN (US)
ZHANG SANHONG (US)
STEINHAUSER LOUIS P (US)
GRIMARD DENNIS STANLEY (US)
Application Number:
PCT/US2012/053137
Publication Date:
June 06, 2013
Filing Date:
August 30, 2012
Export Citation:
Assignee:
WATLOW ELECTRIC MFG (US)
SMITH KEVIN ROBERT (US)
PTASIENSKI KEVIN (US)
DERLER RAY ALAN (US)
SWANSON CAL THOMAS (US)
SCHMIDT PHILIP STEVEN (US)
NOSRATI MOHAMMAD (US)
LINDLEY JACOB ROBERT (US)
BOLDT ALLEN NORMAN (US)
ZHANG SANHONG (US)
STEINHAUSER LOUIS P (US)
GRIMARD DENNIS STANLEY (US)
SMITH KEVIN ROBERT (US)
PTASIENSKI KEVIN (US)
DERLER RAY ALAN (US)
SWANSON CAL THOMAS (US)
SCHMIDT PHILIP STEVEN (US)
NOSRATI MOHAMMAD (US)
LINDLEY JACOB ROBERT (US)
BOLDT ALLEN NORMAN (US)
ZHANG SANHONG (US)
STEINHAUSER LOUIS P (US)
GRIMARD DENNIS STANLEY (US)
International Classes:
H05B1/02; H01L21/67; H05B3/26
Foreign References:
| US20110092072A1 | 2011-04-21 | |||
| US6392205B1 | 2002-05-21 | |||
| US20110000426A1 | 2011-01-06 | |||
| US20080011737A1 | 2008-01-17 | |||
| US20040232136A1 | 2004-11-25 |
Attorney, Agent or Firm:
BURRIS, Kelly, K. (524 South Main Street Suite 20, Ann Arbor MI, US)
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