Title:
HIGH DIELECTRIC NANOSHEET LAMINATE, HIGH DIELECTRIC ELEMENT AND METHOD FOR MANUFACTURING HIGH DIELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2012/157740
Kind Code:
A1
Abstract:
A high dielectric nanosheet laminate that is characterized by being obtained by laminating nanosheets each of which has a thickness of 10 nm or less and is formed of an oxide that has a perovskite structure wherein at least four NbO6 octahedrons, TaO6 octahedrons or TiO6 octahedrons are internally contained in a unit lattice. Consequently, the high dielectric nanosheet laminate is capable of achieving high dielectric constant and good insulation characteristics, which are suitable for high dielectric nanosheet laminate capacitors or the like, at the same time even if formed very thin.
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Inventors:
OSADA MINORU (JP)
EBINA YASUO (JP)
SASAKI TAKAYOSHI (JP)
EBINA YASUO (JP)
SASAKI TAKAYOSHI (JP)
Application Number:
PCT/JP2012/062765
Publication Date:
November 22, 2012
Filing Date:
May 18, 2012
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
OSADA MINORU (JP)
EBINA YASUO (JP)
SASAKI TAKAYOSHI (JP)
OSADA MINORU (JP)
EBINA YASUO (JP)
SASAKI TAKAYOSHI (JP)
International Classes:
C01G33/00; B32B9/00; B32B18/00; B82Y30/00; H01L21/316; H01L21/336; H01L21/822; H01L21/8242; H01L27/04; H01L27/108; H01L29/78
Domestic Patent References:
| WO2008078652A1 | 2008-07-03 | |||
| WO2009142325A1 | 2009-11-26 |
Foreign References:
| JP2000114093A | 2000-04-21 | |||
| JPH11139826A | 1999-05-25 |
Other References:
LI BAOWEN ET AL.: "Layer-by-layer deposition of perovskite-type nanosheets into ultrathin multilayer films and their electrical properties", 89TH ANNUAL MEETING OF THE CHEMICAL SOCIETY OF JAPAN IN SPRING - KOEN YOKOSHU I, 13 March 2009 (2009-03-13), pages 734
Attorney, Agent or Firm:
NISHIZAWA TOSHIO (JP)
Toshio Nishizawa (JP)
Toshio Nishizawa (JP)
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Claims: