Title:
HIGH DISPLACEMENT BISTABLE MICRO ACTUATOR
Document Type and Number:
WIPO Patent Application WO2004063090
Kind Code:
A3
Abstract:
The present invention provides a bistable actuator device formed by thin films for generating mechanical motion in response to an electronic control signal. The present invention combines a thin film bistable mechanical member (1) under compressive stress with piezoelectric thin film force elements to generate improved force and displacement properties in the actuator device. Applications of the bistable actuator device include, but not limited to, a micro pump, and an electronic switch or relay.
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Inventors:
SCHILLER PETER J (US)
Application Number:
PCT/US2004/000667
Publication Date:
December 23, 2004
Filing Date:
January 12, 2004
Export Citation:
Assignee:
TRIAD SENSORS INC (US)
SCHILLER PETER J (US)
SCHILLER PETER J (US)
International Classes:
B81B3/00; H01H57/00; H01H1/00; (IPC1-7): H01L41/09; H01H57/00; B81B3/00; F04B43/04; F16K31/00
Domestic Patent References:
| WO2003014789A2 | 2003-02-20 |
Foreign References:
| FR2753565A1 | 1998-03-20 | |||
| US4383195A | 1983-05-10 | |||
| EP0435653A1 | 1991-07-03 | |||
| EP0518618A2 | 1992-12-16 |
Other References:
SCHOMBURG W K ET AL: "Design optimization of bistable microdiaphragm valves", SENSORS AND ACTUATORS A, ELSEVIER SCIENCE S.A., LAUSANNE, CH, vol. 64, no. 3, 31 January 1998 (1998-01-31), pages 259 - 264, XP004116354, ISSN: 0924-4247
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 02 2 April 2002 (2002-04-02)
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 02 2 April 2002 (2002-04-02)
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