Title:
HIGH-EFFICIENT FLAT TYPE PHOTO BAR USING FIELD EMITTER AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/138041
Kind Code:
A1
Abstract:
The present invention relates to a high-efficient flat type photo bar using a field emitter and a manufacturing method thereof, including: a substrate; a cathode part which is formed as an electrode on an upper portion of the substrate; a nano-field emitter which is patterned at a constant interval on the cathode part; a gate part which is formed horizontally to the cathode part so as to induce the emission of electrons from the field emitter; and an anode part which is insulated and separated from an upper portion of the gate part so as to be formed horizontally to the upper portion of the gate part and includes a target material.
Inventors:
KIM DO YUN (KR)
KIM DEA JUN (KR)
KIM DEA JUN (KR)
Application Number:
PCT/KR2011/009694
Publication Date:
October 11, 2012
Filing Date:
December 16, 2011
Export Citation:
Assignee:
VACUUM SCIENCE & INSTR CO LTD (KR)
KIM DO YUN (KR)
KIM DEA JUN (KR)
KIM DO YUN (KR)
KIM DEA JUN (KR)
International Classes:
H01J35/02; H01J1/30; H01J9/02
Foreign References:
| KR20060061214A | 2006-06-07 | |||
| KR20090050488A | 2009-05-20 | |||
| KR20030055142A | 2003-07-02 |
Attorney, Agent or Firm:
JEONG, Hwoi Hwan (KR)
정회환 (KR)
정회환 (KR)
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Claims: