Title:
HIGH-FREQUENCY ELECTROMAGNETIC FIELD MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/147866
Kind Code:
A1
Abstract:
[Problem] To provide a high-frequency electromagnetic field measurement device that can separate the impact of a high-frequency electromagnetic field and the impact of a high-frequency electric field, that are generated by the input of a high-frequency signal, and that can measure a high-frequency electromagnetic field with high precision. [Solution] A magnetic force sensor (21) is formed from the cantilever of a magnetic force microscope (11) and can detect a magnetic field. A current line (12) is formed from a coil and is disposed so as to be adjacent to an object of measurement (1). A carrier guide means (13) inputs a high-frequency carrier signal to the object of measurement (1), and a reference wave guide means (14) is configured so as to input a high-frequency reference wave signal to the current line (12). Further, the potential when the carrier signal is input to the object of measurement (1) from the carrier guide means (13) is made to match the potential of the magnetic force sensor (21). The magnetic force microscope (11) has a placement stand (22) onto which the object of measurement (1) is placed, a displacement measurement means (23) for measuring the displacement of the magnetic force sensor (21), and a scanning means (24) for scanning the magnetic force sensor (21).
Inventors:
ENDO YASUSHI (JP)
YAMAGUCHI MASAHIRO (JP)
SHIMADA YUTAKA (JP)
MUROGA SHO (JP)
YAMAGUCHI MASAHIRO (JP)
SHIMADA YUTAKA (JP)
MUROGA SHO (JP)
Application Number:
PCT/JP2013/074059
Publication Date:
September 25, 2014
Filing Date:
September 06, 2013
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
G01R29/08
Domestic Patent References:
| WO2012029973A1 | 2012-03-08 |
Other References:
YASUSHI ENDO ET AL.: "High Frequency Magnetic Near Field Measurement Using MFM", THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN KENKYUKAI SHIRYO, no. 169-18, 20 December 2012 (2012-12-20), pages 19 - 24
Y. ENDO ET AL.: "Radio Frequency Magnetic Near Field Measurements of Coplanar Waveguide Simulated Power and Ground Lines in Radio Frequency Integrated Circuits Using a MFM Tip", IEEE TRANSACTIONS ON MAGNETICS, vol. 48, no. 11, November 2012 (2012-11-01), pages 3666 - 3669
Y. ENDO ET AL.: "Radio Frequency Magnetic Near Field Measurements of Coplanar Waveguide Simulated Power and Ground Lines in Radio Frequency Integrated Circuits Using a MFM Tip", IEEE TRANSACTIONS ON MAGNETICS, vol. 48, no. 11, November 2012 (2012-11-01), pages 3666 - 3669
Attorney, Agent or Firm:
SUDA Atsushi et al. (JP)
Atsushi Suda (JP)
Atsushi Suda (JP)
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