Title:
HIGH FREQUENCY GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/205703
Kind Code:
A1
Abstract:
This high frequency generating device 2 for reducing harmonic waves in high-frequency power that is amplified by a high-frequency amplifier and supplied to the plasma generating electrode comprises a high-frequency generation unit 201 which generates a composite wave in which a fundamental wave and a correction wave that is the anti-phase of the harmonics generated for the input of the fundamental wave are combined.
Inventors:
MURAI KOICHI (JP)
Application Number:
PCT/JP2021/000780
Publication Date:
October 14, 2021
Filing Date:
January 13, 2021
Export Citation:
Assignee:
TOKYO KEIKI INC (JP)
International Classes:
H05H1/24; A61L2/14; H05H1/46
Foreign References:
| JP2017228558A | 2017-12-28 | |||
| JP2008060429A | 2008-03-13 | |||
| JP2007208990A | 2007-08-16 |
Attorney, Agent or Firm:
AKAZAWA, Hideo (JP)
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