Title:
HIGH-FREQUENCY PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2004/095698
Kind Code:
A1
Abstract:
The invention relates to radioelectronic engineering, in particular to the piezo-electronic industry producing resonators, generators, filters and similar devices operating at volume acoustic waves in a range of 50-100 MHz. Said invention makes it possible to improve electro-physical parameters of devices operating at volume acoustic waves and to ensure the miniaturisation thereof. The invention is characterised in that the embodiment of a high-quality piezoelement provided with topology in the form of an open-type mesa-structure. The inventive piezoelement is embodied in the form of a shaped monolithic piezoelectric plate provided with a thin vibration area. Said plate is embodied in the form of a polyhedron having T or L-shaped vertical cross section, the active area thereof being bounded by crystallographic planes.
Inventors:
MATSAK ANDREI NIKOLAEVICH (RU)
GRUZINENKO VALERY BORISOVICH (RU)
GRUZINENKO VALERY BORISOVICH (RU)
Application Number:
PCT/RU2003/000537
Publication Date:
November 04, 2004
Filing Date:
December 04, 2003
Export Citation:
Assignee:
MATSAK ANDREI NIKOLAEVICH (RU)
GRUZINENKO VALERY BORISOVICH (RU)
GRUZINENKO VALERY BORISOVICH (RU)
International Classes:
H03H9/02; H03H9/17; H03H9/46; (IPC1-7): H03H9/02; H03H9/17; H03H9/46
Foreign References:
| EP0484545A1 | 1992-05-13 | |||
| RU2099858C1 | 1997-12-20 | |||
| RU2047267C1 | 1995-10-27 | |||
| EP0468051A1 | 1992-01-29 |
Attorney, Agent or Firm:
Skomorokhova, Tamara Sergeevna (2-6/7-66 Moscow, 7, RU)
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