Title:
HIGH-FREQUENCY POWER SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/171640
Kind Code:
A1
Abstract:
Provided is a high-frequency power source device that makes it possible to ascertain the status of a load, while also reducing the size and reducing the cost of the device. The high-frequency power source device is provided with: a high-frequency power source circuit; a detector provided to an output of the high-frequency power source circuit; a high-frequency path connected to an output of the detector; and a matching box that is connected to the high-frequency path and provides a high-frequency power source to an input of a load. The detector is able to acquire information about traveling waves/reflected waves. The high-frequency power source circuit calculates a load impedance by adding the impedance change component at the high-frequency path and the matching box to impedance information in a case where the high-frequency path onward is viewed from the output of the detector, such output calculated from the acquired information about the traveling waves/reflected waves.
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Inventors:
OKADA TAKESHI (JP)
OSHIDA YOSHIYUKI (JP)
FUJIMOTO NAOYA (JP)
OSHIDA YOSHIYUKI (JP)
FUJIMOTO NAOYA (JP)
Application Number:
PCT/JP2018/036368
Publication Date:
September 12, 2019
Filing Date:
September 28, 2018
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC (JP)
International Classes:
H03H7/40; H05H1/46
Foreign References:
| JP2011089873A | 2011-05-06 | |||
| JP2005109183A | 2005-04-21 | |||
| JP2016178446A | 2016-10-06 |
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