HIGH-FREQUENCY POWER SUPPLY DEVICE AND IGNITION VOLTAGE SELECTION METHOD

WIPO Patent Application WO/2013/190986

A1

A load end voltage is brought to a high voltage, and an ignition voltage is selected whereby the load end voltage of a plasma load is high enough to produce plasma discharge. In the supply of high-frequency power to the load, which is performed from a high-frequency power source through an electricity supply unit: (a) the internal impedance of the high-frequency power source is lower than the characteristic impedance of the electricity supply unit; and (b) the electric length (LE) of the electricity supply unit connecting the high-frequency power source and the load and supplying high-frequency power is selected so as to have a predetermined relationship to the basic wavelength (λ) of a high-frequency alternating current, whereby the load end voltage is brought to a high voltage. The selection of the electric length (LE) of the electricity supply unit is made so that the relationship of the electric length (LE) when the load end, which is the input end of the load, is in an open state to the basic wavelength (λ) of the high-frequency alternating current is: (2n-1) • (λ/4)-k • λ ≤ L E ≤ (2n-1) • (λ/4)+k • λ (n being an integer and k being [π-2 • cos-1 (1/K)]/(4π)).

YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)

PCT/JP2013/065338

December 27, 2013

June 03, 2013

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KYOSAN ELECTRIC MFG (JP)
YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)

H05H1/46; H02M7/48

JP2010114001A	2010-05-20
JPH0436482A	1992-02-06
JP2003178989A	2003-06-27
JP2004247401A	2004-09-02
JP2010177525A	2010-08-12
JP2003178989A	2003-06-27
JP2004247401A	2004-09-02
JP2010177525A	2010-08-12

See also references of EP 2833702A4

SHIONOIRI, Akio (JP)
Akio Shionoiri (JP)

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