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Patent Searching and Data


Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE AND IGNITION VOLTAGE SELECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/190986
Kind Code:
A1
Abstract:
A load end voltage is brought to a high voltage, and an ignition voltage is selected whereby the load end voltage of a plasma load is high enough to produce plasma discharge. In the supply of high-frequency power to the load, which is performed from a high-frequency power source through an electricity supply unit: (a) the internal impedance of the high-frequency power source is lower than the characteristic impedance of the electricity supply unit; and (b) the electric length (LE) of the electricity supply unit connecting the high-frequency power source and the load and supplying high-frequency power is selected so as to have a predetermined relationship to the basic wavelength (λ) of a high-frequency alternating current, whereby the load end voltage is brought to a high voltage. The selection of the electric length (LE) of the electricity supply unit is made so that the relationship of the electric length (LE) when the load end, which is the input end of the load, is in an open state to the basic wavelength (λ) of the high-frequency alternating current is: (2n-1) • (λ/4)-k • λ ≤ L E ≤ (2n-1) • (λ/4)+k • λ (n being an integer and k being [π-2 • cos-1 (1/K)]/(4π)).

Inventors:
YUZURIHARA, Itsuo (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
AIKAWA, Satoshi (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
KUNITAMA, Hiroshi (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
Application Number:
JP2013/065338
Publication Date:
December 27, 2013
Filing Date:
June 03, 2013
Export Citation:
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Assignee:
KYOSAN ELECTRIC MFG. CO., LTD. (29-1, Heiancho 2-chome Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
YUZURIHARA, Itsuo (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
AIKAWA, Satoshi (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
KUNITAMA, Hiroshi (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
International Classes:
H05H1/46; H02M7/48
Foreign References:
JP2010114001A2010-05-20
JPH0436482A1992-02-06
JP2003178989A2003-06-27
JP2004247401A2004-09-02
JP2010177525A2010-08-12
JP2003178989A2003-06-27
JP2004247401A2004-09-02
JP2010177525A2010-08-12
Other References:
See also references of EP 2833702A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (Fujisawa-Central Bldg. 6F, 1-4 Kugenuma-Tachibana 1-chome, Fujisawa-sh, Kanagawa 24, 〒2510024, JP)
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