Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE AND REFLECTED WAVE POWER CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2013/190987
Kind Code:
A1
Abstract:
According to the present invention, during high-frequency power supply for supplying high-frequency power to a plasma load, reflected wave power control detects reflected wave power of a high-frequency power source and uses the detected reflected wave power to control the high-frequency power source. With short-term fluctuations in the reflected wave power, the control is based on a peak value fluctuation of the detected value of the reflected wave power, and with long-term fluctuations of the reflected wave power, the control is based on a smoothed value fluctuation obtained by smoothing the detected value of the reflected wave power. A reflected wave power peak value suspended loop system and an arc interruption system, for performing control based on the peak fluctuation in the reflected wave power, and a reflected wave power amount suspended loop system for performing control based on the smoothed power amount of the reflected wave power, are included as reflected wave power control loop systems. In an unignited state until the plasma ignites, the high-frequency power source performs fully reflected wave adaptation that can withstand fully reflected wave power in which traveling wave power returns toward the power source entirely as reflected wave power.
Inventors:
YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)
Application Number:
PCT/JP2013/065339
Publication Date:
December 27, 2013
Filing Date:
June 03, 2013
Export Citation:
Assignee:
KYOSAN ELECTRIC MFG (JP)
YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)
YUZURIHARA ITSUO (JP)
AIKAWA SATOSHI (JP)
KUNITAMA HIROSHI (JP)
International Classes:
H05H1/46; H05H1/00
Domestic Patent References:
| WO2011016266A1 | 2011-02-10 | |||
| WO2009118920A1 | 2009-10-01 | |||
| WO2011125733A1 | 2011-10-13 |
Foreign References:
| JP2003218655A | 2003-07-31 | |||
| JP2005204405A | 2005-07-28 | |||
| JP3641785B2 | 2005-04-27 | |||
| JPH0732078B2 | 1995-04-10 | |||
| JP2004071269A | 2004-03-04 | |||
| JPH10257774A | 1998-09-25 | |||
| JP3998986B2 | 2007-10-31 | |||
| JP2004008893A | 2004-01-15 | |||
| JP2005136933A | 2005-05-26 | |||
| JP3893276B2 | 2007-03-14 |
Other References:
See also references of EP 2833703A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (JP)
Akio Shionoiri (JP)
Akio Shionoiri (JP)
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