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Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE, AND PLASMA IGNITION METHOD
Document Type and Number:
WIPO Patent Application WO/2015/118696
Kind Code:
A1
Abstract:
This high-frequency power supply device is provided with: a plasma ignition step in which pulsed power for igniting plasma is supplied; and a drive-power supplying step in which drive power for maintaining the generated plasma is supplied. In the plasma ignition step, an ignition pulse applied by an ignition pulse output operation is configured from a main pulse which induces ignition, and a pre-pulse which is applied at a stage prior to the main pulse, and which has a lower power than the main pulse. As a result of configuring the ignition pulse from the main pulse and the pre-pulse, the high-frequency power supply is protected from reflected-wave power, and plasma is reliably ignited.

Inventors:
YUZURIHARA, Itsuo (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
AIKAWA, Satoshi (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
OHMA, Ryosuke (29-1, Heiancho 2-chome, Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
Application Number:
JP2014/056411
Publication Date:
August 13, 2015
Filing Date:
March 12, 2014
Export Citation:
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Assignee:
KYOSAN ELECTRIC MFG. CO., LTD. (29-1, Heiancho 2-chome Tsurumi-ku, Yokohama-sh, Kanagawa 31, 〒2300031, JP)
International Classes:
H01T15/00
Domestic Patent References:
WO2013190987A12013-12-27
Other References:
See also references of EP 3010098A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (Fujisawa-Central Bldg. 6F, 1-4 Kugenuma-Tachibana 1-chome, Fujisawa-sh, Kanagawa 24, 〒2510024, JP)
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