HIGH-FREQUENCY POWER SUPPLY DEVICE, AND CONTROL METHOD FOR HIGH-FREQUENCY POWER SUPPLY DEVICE

Title:

HIGH-FREQUENCY POWER SUPPLY DEVICE, AND CONTROL METHOD FOR HIGH-FREQUENCY POWER SUPPLY DEVICE

Document Type and Number:

WIPO Patent Application WO/2018/008164

Kind Code:

A1

Abstract:

The present invention shortens the time required to detect the frequency at which the reflection coefficient or reflected power is a minimum by specifying a frequency sweeping direction in which the reflection coefficient or reflected power moves toward a minimum in frequency control that realizes impedance matching for a high-frequency power supply device by performing frequency sweeping. Frequency control that realizes impedance matching for a high-frequency power supply device is performed using two step control consisting of: (A) phase control of specifying a frequency sweeping direction in which the reflection coefficient or reflected power moves toward a minimum on the basis of a phase state of an oscillation frequency, and initiating increasing/decreasing of the frequency in the specified sweeping direction; and (B) reflected power control of making a reflection coefficient or reflection quantity be a control finish condition at which frequency control is finished.

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Inventors:

YUZURIHARA ITSUO (JP)
OHMA RYOSUKE (JP)

Application Number:

PCT/JP2016/076299

Publication Date:

January 11, 2018

Filing Date:

September 07, 2016

Export Citation:

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Assignee:

KYOSAN ELECTRIC MFG (JP)

International Classes:

H01L21/3065; H05H1/46; H03H7/30

Foreign References:

JP2013153432A	2013-08-08
JP2006310245A	2006-11-09
JP2006310245A	2006-11-09
JP2010027587A	2010-02-04

Other References: