Title:
HIGH-FREQUENCY POWER SUPPLY DEVICE AND OUTPUT CONTROL METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/187138
Kind Code:
A1
Abstract:
Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.
Inventors:
FUJIWARA TAKESHI (JP)
KOJIMA HIROYUKI (JP)
KAWAI SATOSHI (JP)
KOJIMA HIROYUKI (JP)
KAWAI SATOSHI (JP)
Application Number:
PCT/JP2021/008460
Publication Date:
September 23, 2021
Filing Date:
March 04, 2021
Export Citation:
Assignee:
KYOSAN ELECTRIC MFG (JP)
International Classes:
H05H1/46; H01L21/3065
Foreign References:
| JP2019091526A | 2019-06-13 | |||
| US20170103871A1 | 2017-04-13 | |||
| JPH11214363A | 1999-08-06 | |||
| JP2007514300A | 2007-05-31 |
Other References:
See also references of EP 4124180A4
Attorney, Agent or Firm:
AIWA INTERNATIONAL PATENT AGENCY (JP)
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