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Title:
HIGH-FREQUENCY ULTRASONIC PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING SAME, AND HIGH-FREQUENCY ULTRASONIC PROBE INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2016/208425
Kind Code:
A1
Abstract:
According to the present invention, a lower electrode is prepared, and a composite containing a sol-gel solution and a piezoelectric powder is applied by spraying onto the lower electrode. The applied complex is then sintered to form a piezoelectric film, and an upper electrode is formed on the piezoelectric film.

Inventors:
KOBAYASHI, Makiko (39-1 Kurokami 2-chome, Chuo-ku, Kumamoto-sh, Kumamoto 55, 〒8608555, JP)
TANABE, Masayuki (39-1 Kurokami 2-chome, Chuo-ku, Kumamoto-sh, Kumamoto 55, 〒8608555, JP)
SHIINA, Tsuyoshi (Yoshida-honmachi Sakyo-ku, Kyoto-sh, Kyoto 01, 〒6068501, JP)
SUMITA, Kensei (53 Shogoin-Kawahara-cho Sakyo-ku, Kyoto-sh, Kyoto 07, 〒6068507, JP)
KAWAGUCHI, Norio (53 Shogoin-Kawahara-cho Sakyo-ku, Kyoto-sh, Kyoto 07, 〒6068507, JP)
Application Number:
JP2016/067395
Publication Date:
December 29, 2016
Filing Date:
June 10, 2016
Export Citation:
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Assignee:
NATIONAL UNIVERSITY CORPORATION KUMAMOTO UNIVERSITY (39-1, Kurokami 2-chome Chuo-ku, Kumamoto-sh, Kumamoto 55, 〒8608555, JP)
KYOTO UNIVERSITY (36-1, Yoshida-honmachi Sakyo-ku, Kyoto-sh, Kyoto 01, 〒6068501, JP)
ACADEMIC INDUSTRY RESEARCH INC. (53 Shogoin-Kawahara-cho, Sakyo-ku Kyoto-sh, Kyoto 07, 〒6068507, JP)
International Classes:
H01L41/318; H01L41/047; H01L41/09; H01L41/29; H01L41/43; H04R17/00; H04R31/00; A61B8/14
Foreign References:
JP2013168573A2013-08-29
JP2008535643A2008-09-04
JP2002008939A2002-01-11
JP2012011024A2012-01-19
JPH01171200U1989-12-04
JP2014212872A2014-11-17
Other References:
MAKIKO KOBAYASHI: "Sol-gel composite ultrasonic transducers", JOURNAL OF THE ACOUSTICAL SOCIETY OF JAPAN, vol. 71, no. 5, pages 253 - 259
Attorney, Agent or Firm:
ISEKI, Katsumori et al. (PIAS Tower 14F, 3-19-3 Toyosaki, Kita-ku, Osaka -sh, Osaka 72, 〒5310072, JP)
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