Title:
HIGH NA SYSTEM FOR MULTIPLE MODE IMAGING
Document Type and Number:
WIPO Patent Application WO1999049346
Kind Code:
A8
Abstract:
A system for multiple mode imaging is disclosed herein. The system is a catadioptric system preferably having an NA greater than 0.9, highly corrected for low and high order monochromatic aberrations. This system uses unique illumination entrances and can collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. The varifocal tube lens group can continuously change magnifications from 20 to 200x. Imaging modes include bright-field, full sky, ring dark-field, inverted ring dark-field, directional dark-field, double dark-field, Manhattan geometry, confocal bright-field, confocal dark-field, conoscopic, etc. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical.
Inventors:
CHUANG ALEX (US)
SHAFER DAVID R (US)
TSAI BIN-MING B (US)
ARMSTRONG JOSEPH (US)
SHAFER DAVID R (US)
TSAI BIN-MING B (US)
ARMSTRONG JOSEPH (US)
Application Number:
PCT/US1999/006387
Publication Date:
May 18, 2000
Filing Date:
March 23, 1999
Export Citation:
Assignee:
KLA TENCOR CORP (US)
CHUANG ALEX (US)
SHAFER DAVID R (US)
TSAI BIN MING B (US)
ARMSTRONG JOSEPH (US)
CHUANG ALEX (US)
SHAFER DAVID R (US)
TSAI BIN MING B (US)
ARMSTRONG JOSEPH (US)
International Classes:
G01N21/33; G02B13/14; G02B17/08; G02B21/16; G03C5/16; G03F1/00; G03F1/84; G03F3/00; G03F7/20; H04N5/225; (IPC1-7): G02B17/08; G02B21/10; G01N21/88
Download PDF: