Title:
HIGH PERFORMANCE INDUCTION PLASMA TORCH
Document Type and Number:
WIPO Patent Application WO/2012/103639
Kind Code:
A1
Abstract:
An induction plasma torch comprises a tubular torch body, a plasma confinement tube disposed in the tubular torch body coaxial therewith, a gas distributor head disposed at one end of the plasma confinement tube and structured to supply at least one gaseous substance into the plasma confinement tube; an inductive coupling member for applying energy to the gaseous substance to produce and sustain plasma in the plasma confinement tube, and a capacitive shield including a film of conductive material applied to the outer surface of the plasma confinement tube or the inner surface of the tubular torch body. The film of conductive material is segmented into axial strips interconnected at one end. The film of conductive material has a thickness smaller than a skin-depth calculated for a frequency of a current supplied to the inductive coupling member and an electrical conductivity of the conductive material of the film. Aaxial grooves can be machined in the outer surface of the plasma confinement tube or the inner surface of the tubular torch body, the axial grooves being interposed between the axial strips.
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Inventors:
BOULOS MAHER I (CA)
DIGNARD NICOLAS (CA)
AUGER ALEXANDRE (CA)
HUREWICZ JERZY (CA)
THELLEND SEBASTIEN (CA)
DIGNARD NICOLAS (CA)
AUGER ALEXANDRE (CA)
HUREWICZ JERZY (CA)
THELLEND SEBASTIEN (CA)
Application Number:
PCT/CA2012/000094
Publication Date:
August 09, 2012
Filing Date:
February 02, 2012
Export Citation:
Assignee:
TEKNA PLASMA SYSTEMS INC (CA)
BOULOS MAHER I (CA)
DIGNARD NICOLAS (CA)
AUGER ALEXANDRE (CA)
HUREWICZ JERZY (CA)
THELLEND SEBASTIEN (CA)
BOULOS MAHER I (CA)
DIGNARD NICOLAS (CA)
AUGER ALEXANDRE (CA)
HUREWICZ JERZY (CA)
THELLEND SEBASTIEN (CA)
International Classes:
H05H1/30; H05H1/28
Foreign References:
| US6693253B2 | 2004-02-17 | |||
| US6312555B1 | 2001-11-06 | |||
| US5234529A | 1993-08-10 | |||
| US5233155A | 1993-08-03 | |||
| US4897579A | 1990-01-30 | |||
| EP0801413A1 | 1997-10-15 | |||
| US5200595A | 1993-04-06 | |||
| US5560844A | 1996-10-01 | |||
| US6693253B2 | 2004-02-17 | |||
| US6919527B2 | 2005-07-19 | |||
| US5233155A | 1993-08-03 | |||
| EP2341525A2 | 2011-07-06 |
Other References:
D' AGOSTINO ET AL.: "Advanced Plasma Technology", 31 December 2008, WILEY-VCH VERLAG GMBH & CO, ISBN: 978-3-527-40591-6, article COLPO P. ET AL.: "Chapter 2: Plasma Sources and Reactor Configurations", pages: 18, 22, 26, XP003032750
Attorney, Agent or Firm:
PRINCE, Gaétan (25th FloorMontréal, Québec H3B 5C9, CA)
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Claims:
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