Title:
HIGH PRECISION Z-THETA STAGE
Document Type and Number:
WIPO Patent Application WO/2005/109612
Kind Code:
A2
Abstract:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages (12, 13), a carriage (14) supported between the parallel translation stages, and a rotation stage (15) carried by the carriage between the parallel translation stages. Each brushless linear motor (12, 13) is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.
Inventors:
Botos, Stephen J. (597 Dorseyville Road, Pittsburgh, Pennsylvania, 15238, US)
O'connor, Brian P. (2755 Clearview Road, Allison Park, Pennsylvania, 15101, US)
O'connor, Brian P. (2755 Clearview Road, Allison Park, Pennsylvania, 15101, US)
Application Number:
PCT/US2004/035901
Publication Date:
November 17, 2005
Filing Date:
October 28, 2004
Export Citation:
Assignee:
AEROTECH, INC. (101 Zeta Drive, Pittsburgh, Pennsylvania, 15238-2897, US)
Botos, Stephen J. (597 Dorseyville Road, Pittsburgh, Pennsylvania, 15238, US)
O'connor, Brian P. (2755 Clearview Road, Allison Park, Pennsylvania, 15101, US)
Botos, Stephen J. (597 Dorseyville Road, Pittsburgh, Pennsylvania, 15238, US)
O'connor, Brian P. (2755 Clearview Road, Allison Park, Pennsylvania, 15101, US)
International Classes:
B23Q1/01; B23Q1/26; B23Q1/48; B23Q3/00; B23Q5/00; B23Q5/22; B23Q5/28; B23Q7/00; A61F2/00; A61F2/06; A61F2/90; (IPC1-7): H02K41/00; G03B27/58
Attorney, Agent or Firm:
Hanson, David C. (WEBB ZIESENHEIM LOGSDON, ORKIN & HANSON P.C., 700 Koppers Building,
436 Seventh Avenu, Pittsburgh Pennsylvania, 15219-1818, US)