Title:
HIGH PRECISION Z-THETA STAGE
Document Type and Number:
WIPO Patent Application WO2005109612
Kind Code:
A3
Abstract:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages (12, 13), a carriage (14) supported between the parallel translation stages, and a rotation stage (15) carried by the carriage between the parallel translation stages. Each brushless linear motor (12, 13) is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.
Inventors:
BOTOS STEPHEN J (US)
O'CONNOR BRIAN P (US)
O'CONNOR BRIAN P (US)
Application Number:
PCT/US2004/035901
Publication Date:
July 20, 2006
Filing Date:
October 28, 2004
Export Citation:
Assignee:
AEROTECH INC (US)
BOTOS STEPHEN J (US)
O'CONNOR BRIAN P (US)
BOTOS STEPHEN J (US)
O'CONNOR BRIAN P (US)
International Classes:
H02K41/00; B23B47/20; B23Q1/01; B23Q1/26; B23Q1/48; B23Q3/00; B23Q5/00; B23Q5/22; B23Q5/28; B23Q7/00; A61F2/00; A61F2/90
Foreign References:
| US5346345A | 1994-09-13 | |||
| US6698982B2 | 2004-03-02 | |||
| US5368425A | 1994-11-29 | |||
| US2338060A | 1943-12-28 | |||
| US3571634A | 1971-03-23 | |||
| US6227777B1 | 2001-05-08 |
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