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Title:
HIGH-PURITY CRYSTALLINE SILICON, HIGH-PURITY SILICON TETRACHLORIDE, AND PROCESSES FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2010/029894
Kind Code:
A1
Abstract:
Provided are: high-purity crystalline silicon which is more inexpensive and can satisfy not only the quality requirements for a raw material for silicon for solar cells but also part of the quality requirements for silicon for the latest semiconductors; a process for producing the crystalline silicon; high-purity silicon tetrachloride for use in producing high-purity crystalline silicon; and a process for producing the silicon tetrachloride.  The high-purity crystalline silicon has a boron content of 0.015 ppm by weight or lower and a zinc content of 50-1,000 ppb by weight.  The process for producing high-purity crystalline silicon is characterized by feeding silicon tetrachloride gas and zinc gas to a vertical reactor, reacting the gases at 800-1,200ºC to thereby yield crude crystalline silicon on the tip of the silicon tetrachloride gas feed nozzle and grow the crude crystalline silicon downward from the tip of the silicon tetrachloride gas feed nozzle, discharging the grown crude crystalline silicon from the reactor, and treating the discharged crude crystalline silicon with an acid.

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Inventors:
HAYASHIDA SATOSHI (JP)
KATO WATARU (JP)
Application Number:
PCT/JP2009/065485
Publication Date:
March 18, 2010
Filing Date:
September 04, 2009
Export Citation:
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Assignee:
CHISSO CORP (JP)
NIPPON MINING HOLDINGS INC (JP)
TOHO TITANIUM CO LTD (JP)
HAYASHIDA SATOSHI (JP)
KATO WATARU (JP)
International Classes:
C01B33/033; C30B29/06
Foreign References:
JP2005179183A2005-07-07
JPH08259211A1996-10-08
JP2007145663A2007-06-14
JP2007126342A2007-05-24
JP2006062948A2006-03-09
JP2006100255A2006-04-13
JP2003034519A2003-02-07
JP2004149351A2004-05-27
JP2007055891A2007-03-08
JP2867306B21999-03-08
JP2003034519A2003-02-07
JP2003342016A2003-12-03
JP2007145663A2007-06-14
Other References:
See also references of EP 2322477A4
Attorney, Agent or Firm:
SSINPAT PATENT FIRM (JP)
Patent business corporation SSINPAT (JP)
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