Title:
HIGH PURITY NIOBIUM AND PRODUCTS CONTAINING THE SAME, AND METHODS OF MAKING THE SAME
Document Type and Number:
WIPO Patent Application WO2001096620
Kind Code:
A3
Abstract:
High purity niobium metals and alloys containing the same are described. The niobium metal preferably has a purity of at least 99.99 % and more preferably at least 99.999 %. In addition, niobium metal and alloys thereof are described, which either have a grain size of about 150 microns or less, or a texture in which a (100) intensity within any 5 % increment of thickness is less than about 30 random, or an incremental log ratio of (111):(100) intensity of greater than about -4.0, or any combination of these properties. Also described are articles and components made from the niobium metal which include, but are not limited to, sputtering targets, capacitor cans, resistive film layers, wire, and the like. Also disclosed is a process for making the high purity niobium metal which includes the step of reacting a salt-containing niobium and a metal salt along with at least one compound capable of reducing the salt-containing niobium to niobium and in a reaction container. The reaction container or liner in the reaction container and the agitator or liner on the agitator are made from a metal material having the same or higher vapour pressure of melted niobium. The high purity niobium product preferably has a fine and uniform microstructure.
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Inventors:
MICHALUK CHRISTOPHER A
HUBER LOUIS E JR
HUBER LOUIS E JR
Application Number:
PCT/US2001/016438
Publication Date:
August 08, 2002
Filing Date:
May 21, 2001
Export Citation:
Assignee:
CABOT CORP (US)
International Classes:
B22D21/02; B22D7/00; B22D21/06; B22D27/02; C22B5/04; C22B34/24; C22C27/02; C23C14/34; H01L21/28; H01L21/285; (IPC1-7): C22B34/24; C23C14/34
Domestic Patent References:
| WO2000031310A1 | 2000-06-02 | |||
| WO1999061670A1 | 1999-12-02 |
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