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Title:
HIGH Q FACTOR INDUCTOR STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2014/145422
Kind Code:
A3
Abstract:
The present disclosure provides a vertical inductor structure in which the magnetic field is closed such that the magnetic field of the vertical inductor structure is cancelled in the design direction outside the vertical inductor structure, yielding a small, or substantially zero, coupling factor of the vertical inductor structure. In one embodiment, several vertical inductor structures of the present disclosure can be placed in close proximity to create small resonant circuits and filter chains.

Inventors:
LEIPOLD, Dirk, Robert, Walter (1035 Coleman Rd, Apt. 7118San Jose, California, 95123, US)
CHANG, Danny, W. (526 Kirkham Street, San Francisco, California, 94122, US)
MAXIM, George (3151 Summercreek Drive, San Jose, California, 95136, US)
Application Number:
US2014/030188
Publication Date:
November 06, 2014
Filing Date:
March 17, 2014
Export Citation:
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Assignee:
RF MICRO DEVICES, INC. (7628 Thorndike Road, Greensboro, North Carolina, 27409, US)
International Classes:
H01F17/00; H01L23/00
Domestic Patent References:
WO2001046971A12001-06-28
Foreign References:
US20080002380A12008-01-03
US20070085648A12007-04-19
KR20110114238A2011-10-19
US20050150106A12005-07-14
US20120268229A12012-10-25
US20080297299A12008-12-04
US20080164967A12008-07-10
Other References:
KAMALI-SARVESTANI R ET AL: "Fabrication of high quality factor RF-resonator using embedded inductor and via capacitor", IECON 2010 - 36TH ANNUAL CONFERENCE ON IEEE INDUSTRIAL ELECTRONICS SOCIETY, IEEE, PISCATAWAY, NJ, USA, 7 November 2010 (2010-11-07), pages 2283 - 2287, XP031840207, ISBN: 978-1-4244-5225-5
DUPLESSIS M ET AL: "Physical implementation of 3D integrated solenoids within silicon substrate for hybrid IC applications", MICROWAVE CONFERENCE, 2009. EUMC 2009. EUROPEAN, IEEE, PISCATAWAY, NJ, USA, 29 September 2009 (2009-09-29), pages 1006 - 1009, XP031669887, ISBN: 978-1-4244-4748-0
Attorney, Agent or Firm:
WITHROW, Benjamin, S. (Withrow & Terranova, P.L.L.C.100 Regency Forest Drive,Suite 16, Cary North Carolina, 27518, US)
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