Title:
HIGH-Q MICROMECHANICAL RESONATOR DEVICES AND FILTERS UTILIZING SAME
Document Type and Number:
WIPO Patent Application WO2005074502
Kind Code:
A3
Abstract:
High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical "hollow-disk" ring resonators obtained by removing quadrants of material from solid disk resonators, but purposely leaving intact beams or spokes of material with quarter-wavelength dimensions to non-intrusively support the resonators. The use of notched support attachments closer to actual extensional ring nodal points further raises the Q. Vibrating micromechanical hollow-disk ring filters including mechanically coupled resonators with resonator Q's greater than 10,000 achieve filter Q's on the order of thousands via a low-velocity coupling scheme. A longitudinally mechanical spring is utilized to attach the notched-type, low-velocity coupling locations of the resonators in order to achieve a extremely narrow passband.
Inventors:
NGUYEN CLARK T C (US)
LI SHENG-SHIAN (US)
LI SHENG-SHIAN (US)
Application Number:
PCT/US2005/002076
Publication Date:
August 31, 2006
Filing Date:
January 21, 2005
Export Citation:
Assignee:
UNIV MICHIGAN (US)
NGUYEN CLARK T C (US)
LI SHENG-SHIAN (US)
NGUYEN CLARK T C (US)
LI SHENG-SHIAN (US)
International Classes:
H03H9/00; H03H3/007; H03H9/02; H03H9/24; H03H9/46; H03H9/50; H03H9/54
Foreign References:
| US6686807B1 | 2004-02-03 | |||
| US5537083A | 1996-07-16 |
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