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Title:
HIGH RESOLUTION ATOM PROBE
Document Type and Number:
WIPO Patent Application WO2004111604
Kind Code:
A3
Abstract:
A three dimensional atom probe comprising a sharp specimen (10) coupled to a mounting means (12) where emission of charged particles is caused by application of a potential to the specimen tip (10) such that charged particles are influenced by filtering electrodes (206, 204) before impingement on a detection screen (202).

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Inventors:
GRIBB TYE TRAVIS (US)
Application Number:
PCT/US2004/016590
Publication Date:
August 18, 2005
Filing Date:
May 26, 2004
Export Citation:
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Assignee:
IMAGO SCIENT INSTR (US)
GRIBB TYE TRAVIS (US)
International Classes:
G01N25/00; H01J37/285; G01N; (IPC1-7): H01J37/285; G01N25/00
Foreign References:
US4206408A1980-06-03
US6580069B12003-06-17
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