Title:
HIGH RESOLUTION PIEZOELECTRIC MOTOR
Document Type and Number:
WIPO Patent Application WO2004012279
Kind Code:
A3
Abstract:
A piezoelectric motor (20) for moving and positioning a load (22), the motor comprising: a piezoelectric vibrator (24) having a plurality of electrodes (31-34, 36) and a coupling surface which is pressed to a load; and a power supply (40) selectively operable to electrify at least one vibrator electrode with time varying voltage to generate vibrations in the coupling surface that step the load to a desired position or to electrify at least one vibrator electrode with DC voltage to displace the coupling surface and move thereby the load to a desired position, which DC voltage the power supply maintains to maintain the load at the desired position.
More Like This:
| JPH08261137 | ACTUATOR |
| JP6746559 | Zinc oxide piezoelectric device |
Inventors:
GANOR ZE EV (IL)
Application Number:
PCT/IL2003/000603
Publication Date:
March 18, 2004
Filing Date:
July 23, 2003
Export Citation:
Assignee:
NANOMOTION LTD (IL)
GANOR ZE EV (IL)
GANOR ZE EV (IL)
International Classes:
H01L41/09; H02N2/02; (IPC1-7): H01L41/09
Domestic Patent References:
| WO2000074153A1 | 2000-12-07 |
Foreign References:
| EP0313072A1 | 1989-04-26 | |||
| EP0755054A2 | 1997-01-22 |
Other References:
MORI K ET AL: "Ultrasonic linear motor for a high precision X-Y stage", IEEE 1989 ULTRASONICS SYMPOSIUM PROCEEDINGS, MONTREAL, QUE., CANADA, 3-6 OCT. 1989, 3 October 1989 (1989-10-03), New York, USA, pages 657 - 660, XP010090704
Download PDF: