Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HIGH-SPEED DRYER
Document Type and Number:
WIPO Patent Application WO/2003/069246
Kind Code:
A1
Abstract:
A work which has been cleaned with a nonvolatile liquid or volatile liquid is rapidly dried at low cost while preventing the surface of the work from oxidizing. The detergent remaining on the work which has been cleaned is removed to such a degree that the existence of the detergent does not allow the surface of the work to be oxidized by air. Immediately thereafter, the work is placed in an ultra-drying atmosphere to completely remove the detergent remaining on the work.

Inventors:
Takemori, Toshinori c/o KYOWA KAKO CO. LTD. (20-15, Higashiikebukuro 3-Chom, Toshima-Ku Tokyo, 170-0013, JP)
Motegi, Masaki c/o KYOWA KAKO CO. LTD. (20-15, Higashiikebukuro 3-Chom, Toshima-Ku Tokyo, 170-0013, JP)
Application Number:
PCT/JP2003/000624
Publication Date:
August 21, 2003
Filing Date:
January 24, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Kyowa Kako, Ltd CO. (20-15, Higashiikebukuro 3-Chome Toshima-Ku, Tokyo, 170-0013, JP)
Takemori, Toshinori c/o KYOWA KAKO CO. LTD. (20-15, Higashiikebukuro 3-Chom, Toshima-Ku Tokyo, 170-0013, JP)
Motegi, Masaki c/o KYOWA KAKO CO. LTD. (20-15, Higashiikebukuro 3-Chom, Toshima-Ku Tokyo, 170-0013, JP)
International Classes:
F26B15/00; F26B5/00; F26B5/14; F26B15/12; F26B21/00; H01L21/00; H01L21/304; (IPC1-7): F26B15/00; F26B5/00; H01L21/304
Foreign References:
JPH11316084A
JPH0252436U
JP2000084515A
JPH0585070U
JPH07302779A
Attorney, Agent or Firm:
Nakamura, Minoru (Shin-Tokyo Bldg, 3-1 Marunouchi 3-Chom, Chiyoda-Ku Tokyo, 100-8355, JP)
Download PDF: