Title:
HIGH-SPEED METROLOGY
Document Type and Number:
WIPO Patent Application WO/2020/142131
Kind Code:
A3
Abstract:
A method and an apparatus are directed to characterizing a continuously moving 3D object via interferometry -based scanning. The method includes repeatedly forming several depth characterizations of the 3D object along respective scan lines of a plurality of scan lines on the surface of the 3D object. During this scanning, the 3D object is undergoing its continuous motion. The method further includes combining the determined depth characterization along the scan lines of the plurality of scan lines to form a depth map representing at least a depth of a portion associated with a location on the surface of the 3D object in the third direction on a grid of locations arranged in the first and second directions. Forming the depth characterizations includes scanning a frequency-dispersed pulsed optical signal in a first direction across the continuously moving 3D object, said 3D object moving in a second direction substantially orthogonal to the first direction. The scanned optical signal forming scan lines on a surface of the 3D object in a third direction substantially orthogonal to the first direction and the second direction.
Inventors:
WEBER AARON (US)
VIDIMCE KIRIL (US)
ZENGERLE WALTER (US)
CHEN DESAI (US)
MATUSIK WOJCIECH (US)
VIDIMCE KIRIL (US)
ZENGERLE WALTER (US)
CHEN DESAI (US)
MATUSIK WOJCIECH (US)
Application Number:
PCT/US2019/056747
Publication Date:
November 05, 2020
Filing Date:
October 17, 2019
Export Citation:
Assignee:
INKBIT LLC (US)
International Classes:
G01B9/02
Foreign References:
| US20130182260A1 | 2013-07-18 | |||
| JP2014098555A | 2014-05-29 | |||
| US20180143147A1 | 2018-05-24 |
Other References:
DANIEL MARKL ET AL: "In-line quality control of moving objects by means of spectral-domain OCT", OPTICS AND LASERS IN ENGINEERING, vol. 59, 1 August 2014 (2014-08-01), AMSTERDAM, NL, pages 1 - 10, XP055671920, ISSN: 0143-8166, DOI: 10.1016/j.optlaseng.2014.02.008
WOLFGANG WIESER ET AL: "Multi-Megahertz OCT: High quality 3D imaging at 20 million A-scans and 45 GVoxels per second", OPTICS EXPRESS, vol. 18, no. 14, 5 July 2010 (2010-07-05), pages 14685, XP055135897, ISSN: 1094-4087, DOI: 10.1364/OE.18.014685
HUO TIANCHENG ET AL: "Ultrahigh-speed optical coherence tomography utilizing all-optical 40 MHz swept-source", JOURNAL OF BIOMEDICAL OPTICS, SPIE, vol. 20, no. 3, 1 March 2015 (2015-03-01), pages 30503, XP060053747, ISSN: 1083-3668, [retrieved on 20150324], DOI: 10.1117/1.JBO.20.3.030503
WOLFGANG WIESER ET AL: "Multi-Megahertz OCT: High quality 3D imaging at 20 million A-scans and 45 GVoxels per second", OPTICS EXPRESS, vol. 18, no. 14, 5 July 2010 (2010-07-05), pages 14685, XP055135897, ISSN: 1094-4087, DOI: 10.1364/OE.18.014685
HUO TIANCHENG ET AL: "Ultrahigh-speed optical coherence tomography utilizing all-optical 40 MHz swept-source", JOURNAL OF BIOMEDICAL OPTICS, SPIE, vol. 20, no. 3, 1 March 2015 (2015-03-01), pages 30503, XP060053747, ISSN: 1083-3668, [retrieved on 20150324], DOI: 10.1117/1.JBO.20.3.030503
Attorney, Agent or Firm:
ROHLICEK, J., Robin (US)
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