Title:
HIGH TEMPERATURE THIN FILM TRANSISTOR ON SODA LIME GLASS
Document Type and Number:
WIPO Patent Application WO/2010/111286
Kind Code:
A3
Abstract:
The present invention generally comprises a low cost TFT and a method of manufacturing a TFT. For TFTs, soda lime glass would be an attractive alternative to non-alkali glass, but a soda lime glass substrate will permit sodium to diffuse into the active layer and degrade the performance of the TFT. Substrates comprising a polyimide, because they are flexible, would also be attractive to utilize instead of non-alkali glass substrates, but the plastic substrates permit carbon to diffuse into the active layer. By depositing a silicon oxynitride adhesion layer over the soda lime glass substrate and a silicon rich barrier layer over the adhesion layer, diffusion may be reduced and deposition may occur at high temperatures. Thus, a lower cost TFT may be produced with a soda lime glass substrate or a substrate comprising a polyimide as compared to a non-alkali glass substrate.
Inventors:
YANG YA-TANG (US)
PARK BEOM SOO (US)
WON TAE K (US)
CHOI SOO YOUNG (US)
PARK BEOM SOO (US)
WON TAE K (US)
CHOI SOO YOUNG (US)
Application Number:
PCT/US2010/028341
Publication Date:
January 13, 2011
Filing Date:
March 23, 2010
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
YANG YA-TANG (US)
PARK BEOM SOO (US)
WON TAE K (US)
CHOI SOO YOUNG (US)
YANG YA-TANG (US)
PARK BEOM SOO (US)
WON TAE K (US)
CHOI SOO YOUNG (US)
International Classes:
H01L29/786; H01L21/205
Foreign References:
| US20050106787A1 | 2005-05-19 | |||
| US5034795A | 1991-07-23 | |||
| US20040090588A1 | 2004-05-13 |
Attorney, Agent or Firm:
PATTERSON, Todd, B. et al. (L.L.P.3040 Post Oak Blvd.,Suite 150, Houston Texas, US)
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