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Title:
HIGHLY ABRASION-RESISTANT IMPRINT MATERIAL
Document Type and Number:
WIPO Patent Application WO/2011/132616
Kind Code:
A1
Abstract:
Provided is a highly abrasion-resistant imprint material. The imprint material comprises a compound that has C2-3 alkylene oxide units and at least two polymerizable groups as component (A) and a photopolymerization initiator as component (B). The polymerizable groups are at least one selected from the group consisting of acryloyloxy, acryloyl, methacryloyloxy, and methacryloyl groups. The imprint material can further comprise, in addition to component (A), a compound that has at least two polymerizable groups but does not have C2-3 alkylene oxide units as component (A').

Inventors:
KOBAYASHI, Junpei (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
小林 淳平 (〒52 千葉県船橋市鈴身町488番地6 日産化学工業株式会社 電子材料研究所内 Chiba, 〒2740052, JP)
KATO, Taku (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
加藤 拓 (〒52 千葉県船橋市鈴身町488番地6 日産化学工業株式会社 電子材料研究所内 Chiba, 〒2740052, JP)
Application Number:
JP2011/059420
Publication Date:
October 27, 2011
Filing Date:
April 15, 2011
Export Citation:
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Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD. (7-1 Kanda-Nishiki-cho 3-chome, Chiyoda-ku Tokyo, 54, 〒1010054, JP)
日産化学工業株式会社 (〒54 東京都千代田区神田錦町三丁目7番地1 Tokyo, 〒1010054, JP)
KOBAYASHI, Junpei (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
小林 淳平 (〒52 千葉県船橋市鈴身町488番地6 日産化学工業株式会社 電子材料研究所内 Chiba, 〒2740052, JP)
KATO, Taku (Ltd. Electronic Materials Research Laboratories 488-6, Suzumi-cho, Funabashi-sh, Chiba 52, 〒2740052, JP)
International Classes:
H01L21/027; C08F2/50; C08F20/28; C08F299/02
Domestic Patent References:
WO2007029542A1
WO2009101758A1
Foreign References:
JPH1180293A
JPH10182745A
JP2008238416A
Attorney, Agent or Firm:
HANABUSA, Tsuneo et al. (Shin-Ochanomizu Urban Trinity 2, Kandasurugadai 3-chome, Chiyoda-k, Tokyo 62, 〒1010062, JP)
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Claims: