Title:
HIGHLY EFFICIENT AIR CONDITIONING APPARATUS, USING WASTE HEAT, FOR PRECISELY CONTROLLING THERMO-HYGROSTAT IN CLEAN ROOM
Document Type and Number:
WIPO Patent Application WO/2014/058195
Kind Code:
A1
Abstract:
The present invention relates to an air conditioning apparatus for controlling the temperature, humidity, and the filtration of air supplied to a clean room in a semiconductor manufacturing facility and, more particularly, to a highly efficient air conditioning apparatus, using waste heat, for precisely controlling a thermo-hygrostat in a clean room, which recovers waste heat released into the atmosphere by a conventional air conditioning system so as to control humidity with an energy supply reduced by the amount of energy from the waste heat, and which divides a waste heat reuse coil and a condensing coil into multiple steps so as to precisely and effectively control the change in the amount of heat released by a condenser as the dehumidification load of an evaporator changes in line with the change in an indoor load or a fresh air load.
Inventors:
KIM GWON-JUNG (KR)
Application Number:
PCT/KR2013/008945
Publication Date:
April 17, 2014
Filing Date:
October 07, 2013
Export Citation:
Assignee:
E G ENC CO LTD (KR)
International Classes:
F24F5/00; F24F11/02; F24F12/00; H01L21/02
Foreign References:
| KR101170012B1 | 2012-08-01 | |||
| KR20070038287A | 2007-04-10 | |||
| KR20080037433A | 2008-04-30 | |||
| JP2004170044A | 2004-06-17 |
Attorney, Agent or Firm:
PARK, Dae-Gyoo (KR)
박대규 (KR)
박대규 (KR)
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